E-EC-ABL-X One-dimensional air floating Precision Linear Stages

Short Description:

The E-EC-ABL-X series linear motor platform adopts the method of air bearing guide rail combined with iron core linear motor, which has straightness and flatness unmatched by traditional mechanical guide rails, and is especially suitable for small step distances or ultra-precise positioning application scenarios. It is an excellent application choice for precision optical debugging, installation and processing.

● Air bearing linear guide has very good flatness and straightness

● Iron core linear motor ensures sufficient system rigidity and dynamic performance

● Quiet and stable operation with extremely low noise

● It have a very high level of precision performance

● Ideal for scanning applications or high-precision positioning

● Cleanroom compatible

● Size of the motion platform 210 mm × 100 mm

● Travel ranges 200 mm to 500 mm

● Resolution to 100nm or 1 nm

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Product Detail

SPECIFICATION

FAQ

Product Tags

Product overview

E-EC-ABL-X One-dimensional air floating motion stage1 (1)

The stages are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 10 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.

Accessories and options

● Encoder;

● Filter and Air Preparation Kits;

● Single and multi-axis motion controller;

● Pneumatic lock/unlock option;

● XY setups and individual configurations;

● Cable track variations;

● Options with counterweight for vertical (Z) orientation;

● Customizations available;

● Base plates made of granite and systems for reducing vibration;

Application fields

E-EC-ABL-X One-dimensional air floating motion stage1 (2)

Positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes stages ideal for cleanroom applications.

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Specification	EC-ABL-200	-300	-400	-500
Motor type	Linear motor with iron core
Opticval Encode resolution	Default 0.1um (optional analog, up to 1nm)
Motor thrust	Continuous 90N/peak 190N
Acceleration（no load）	5G
Travel [mm]	100	200	300	400
Repeatability Accuracy [um]	≤±0.2um (if optional 5nm grating, up to ±50nm)
Accuracy [um]	2um/100mm (less than 0.5um/100mm after calibration)
Flatness [um]	≤±0.4	≤±0.5	≤±0.7	≤±0.8
Straightness [um]	≤±0.5
Max Speed [mm/s]	1000 (depending on the drive and stroke)
Max load capacity [kg]	10kg

1) What is the MOQ?
A: MOQ is 1 pcs.
Sample is available for customer to check the quality before bulk order.

2) Do you accept OEM?
A: Yes, OEM and ODM is warmly welcomed.
It is our company’s strength, we can customize the LCD monitor so that can fully meet customers’ requirements.

3) What payment methods does your company accept?
A: T/T, Western Union, Paypal and L/C.

4) What’s the delivery time?
A: Sample: 2-7 working days. bulk order 7-25 working days.
For customized products, delivery time is negotiable.
We will try our best to meet your delivery time.

Air Bearing Stage